Flow rate-dependent properties of SnO2 thin films deposited by ultrasonic spray pyrolysis

Abstract

This study unveils the outcomes of fabricating and characterizing SnO2 thin films through ultrasonic spray pyrolysis. Also, it focuses on the effect of manipulating flow rates on their structural, optical, and electrical characteristics. Structural analysis revealed that the films exhibited a tetragonal rutile structure and (200) crystallographic planes become preferential as the flow rate increases. Crystallite size and lattice strain were calculated using the Debye-Scherrer and Williamson-Hall methods, demonstrating that higher the flow rate resulted in larger crystallite sizes and reduced lattice strain. SEM images showed that all films have uniform and consistent film thickness and grain size enlarged with the solution flow rate as well. The films exhibited high optical transparency (>80%) in the visible spectrum, making them suitable for transparent conductive applications. The band gap of the films decreased gradually with flow rates, and the Urbach energy slightly increased. Hall effect measurements revealed higher flow rates resulted in lower sheet resistance (lowest is 1.32 x 10(2) Omega/sq) and higher carrier mobility (highest is 22.12 cm(2)/V.s), indicating improved electrical properties. These findings offer valuable perspectives for forthcoming researches.